Fabrication of BaTiO3 Thin Films and Microdot Patterns by Halide‐Free Nonaqueous Solution Route
Fabrication of BaTiO3 Thin Films and Microdot Patterns by Halide‐Free Nonaqueous Solution Route
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DOI：
10.1111/j.1551-2916.2009.03383.x
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发表时间：
2010-02
影响因子：
3.9
通讯作者：
H. Wagata;T. Taniguchi;R. Gallage;A. Subramani;N. Sakamoto;Tomoaki Watanabe;M. Yoshimura;N. Matsushita
中科院分区：
文献类型：
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作者：
H. Wagata;T. Taniguchi;R. Gallage;A. Subramani;N. Sakamoto;Tomoaki Watanabe;M. Yoshimura;N. Matsushita
本文报道了用含Ba和Ti醇盐的前驱体溶液制备钛酸钡（BaTiO 3）薄膜。L-脯氨酸用于防止Ba和Ti醇盐在乙醇和丁基卡必醇的混合溶剂中在环境条件下沉淀。X射线衍射和拉曼光谱分析表明，在空气中650 ° C退火后，沉积的非晶薄膜晶化为四方相BaTiO 3。扫描电子显微镜观察表明，钛酸钡薄膜是免费的裂纹，即使在退火后，并表现出良好的附着力的基板。由于所开发的前体溶液在空气中足够稳定，因此还使用喷墨系统进行BaTiO 3的点图案化。
This paper reports on the fabrication of barium titanate (BaTiO3) thin films using a precursor solution containing Ba and Ti alkoxides. l-proline was used to prevent the precipitation of Ba and Ti alkoxides in a mixed solvent of ethanol and butylcarbitol under ambient conditions. Analysis of X-ray diffraction and Raman spectra revealed that the as-deposited amorphous film crystallized into a tetragonal BaTiO3 phase after annealing at 650°C in air. Scanning electron microscopic observations showed that the BaTiO3 film was free from cracks even after annealing and exhibited good adhesion to the substrate. Because the precursor solution developed was sufficiently stable in air, dot patterning of BaTiO3 was also performed using an inkjet system.