Miniature bulk PZT traveling wave ultrasonic motors for low-speed high-torque rotary actuation.
Miniature bulk PZT traveling wave ultrasonic motors for low-speed high-torque rotary actuation.
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DOI：
10.1109/jmems.2018.2823980
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发表时间：
2018-06
期刊：
影响因子：
--
通讯作者：
DeVoe DL
中科院分区：
文献类型：
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作者：
Hareesh P;DeVoe DL
介绍了一种由单层均匀压电块体的锆钛酸铅(PZT)制成的行波超声微电机。微型电机能够以可控的速度进行双向旋转运动。利用横向叉指电极在图案化的块状PZT衬底中激发行波，采用一种基于微粉爆破的简单、低成本的制造技术对单片微电机定子进行图案化。利用集成玻璃转子的装置，在微细加工的定子和转子元件之间施加一定的预紧力，研究了超声微电机的性能。对于直径为4.12 mm的PZT定子，在施加323mN的预紧力时，其最大转速为30rpm，失速扭矩为501mN·mm。
Traveling wave ultrasonic micromotors fabricated from a single layer of homogeneous bulk piezoelectric lead zirconate titanate (PZT) are described. The miniature motors are capable of bi-directional rotary motion with controllable speeds. By taking advantage of transverse interdigitated electrodes to excite traveling waves in a patterned bulk PZT substrate, the monolithic micromotor stators are patterned using a simple and low cost fabrication technique based on micropowder blasting. Performance of the ultrasonic micromotors is explored using devices with integrated glass rotors, using defined preload forces applied between the microfabricated stator and rotor elements. For the case of a 4.12 mm diameter PZT stator, a maximum speed of 30 rpm and stall torque of 501 mN · mm are achieved when applying a 323 mN preload force to the rotor.