Epitaxial Growth of Oxide Thin Films on Si Substrate by Introducing Buffer Layers and Their Applications

Epitaxial Growth of Oxide Thin Films on Si Substrate by Introducing Buffer Layers and Their Applications
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引入缓冲层的硅衬底氧化物薄膜外延生长及其应用

DOI:
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发表时间:
2007
期刊:
影响因子:
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通讯作者:
K. Kurihara
K. Kurihara
中科院分区:
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文献类型:
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作者:
K. Shinozaki;T. Kiguchi;N. Wakiya;K. Kurihara

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