On-blaze operation of a Mo/Si multilayer-coated, concave diffraction grating in the 136-142-A wavelength region and near normal incidence.
On-blaze operation of a Mo/Si multilayer-coated, concave diffraction grating in the 136-142-A wavelength region and near normal incidence.
复制标题
Mo/Si 多层涂层凹面衍射光栅在 136-142-A 波长范围内且接近垂直入射的闪耀操作。
作者：
J. Seely;M. Kowalski;W. Hunter;J. Rife;T. Barbee;G. Holland;C. Boyer;C. Brown
对一种具有Mo/Si多层膜的凹面2400槽/mm闪耀衍射光栅的效率和分辨本领进行了测定。多层涂层在140 A近垂直入射时具有55%的峰值反射率。对于136-139-A范围内的波长，多层光栅的效率在接近垂直入射时为2%。该效率比相同波长区域中的姐妹复制品Au涂覆光栅的效率高150倍。多层膜光栅在第一阶波长为140.451埃的Vviii跃迁的第三阶的分辨能力为9100。与Au涂层光栅的比较表明，多层涂层的应用不影响分辨率或闪耀角。
The efficiency and resolving power of a concave, 2400-groove/mm, blazed diffraction grating that had a Mo/Si multilayer coating were determined. The multilayer coating had a peak reflectance of 55% at 140-A near normal incidence. The efficiency of the multilayer grating for wavelengths in the 136-139-A range was 2% near normal incidence. This efficiency was a factor of 150 greater than the efficiency of a sister replica Au-coated grating in the same wavelength region. The resolving power of the multilayercoated grating in the third order of a V viii transition with a first-order wavelength of 140.451 A was 9100. Comparisons with the Au-coated grating indicated that the application of the multilayer coating did not affect the resolving power or the blaze angle.