Nanofabricated concentric ring structures by templated self-assembly of a diblock copolymer
Nanofabricated concentric ring structures by templated self-assembly of a diblock copolymer
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DOI：
10.1021/nl802011w
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发表时间：
2008-09-01
期刊：
影响因子：
10.8
通讯作者：
Ross, C. A.
中科院分区：
文献类型：
--
作者：
Jung, Yeon Sik;Jung, Wonjoon;Ross, C. A.
The formation of well-controlled circular patterns on the nanoscale is important for the fabrication of a range of devices such as sensors, memories, lasers, transistors, and quantum devices. Concentric, smooth ring patterns with tunable dimensions have been formed from a cylinder-forming poly(styrene-b-dimethylsiloxane) (PS-PDMS) diblock copolymer under confinement in shallow circular trenches. The high etch selectivity between PS and PDMS facilitates pattern transfer, illustrated by the fabrication of arrays of ferromagnetic cobalt rings with a density of 1.1 X 10(9)/cm(2). The effects of confinement diameter and commensurability on the diameter and period of the concentric rings are analyzed using a free energy model that includes interfacial, strain, and bending energies. This work provides a simple process for the fabrication of nanoscale circular patterns with very narrow line width using a much coarser-scale template, and may facilitate the miniaturization of a variety of microelectronic devices.
