Determination of the Film Thickness and the Effective Medium Approximation Theories in Ellipsometry
Determination of the Film Thickness and the Effective Medium Approximation Theories in Ellipsometry
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椭偏仪中膜厚的测定及有效介质近似理论
DOI：
10.1380/jsssj.18.681
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发表时间：
1997
期刊：
影响因子：
--
通讯作者：
S. Kawabata
中科院分区：
文献类型：
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作者：
S. Kawabata
椭偏法是一种灵敏度极高的薄膜厚度测定方法。样品的复振幅反射比是分析光学常数的一个基本公式。介绍了单层和多层样品复振幅反射比的分析方法。介绍了同时测定单透明薄膜的折射率和厚度的计算方法。本文还描述了不同膜厚的单吸波层的分析方法。给出了多层样品复振幅反射系数的计算算法。麦克斯韦-加内特和布鲁格曼的有效介质近似理论是从克劳修斯-莫索蒂公式出发推导出来的。
Ellipsometry is an extremely high sensitive method for the film thickness determination. The complex amplitude reflection ratio of the sample is a basic formula for the analysis of the optical constants. The analytical methods of the complex amplitude reflection ratio are described for the both samples of single layer and multilayers. The calculation method for the simultaneous determination of the refractive index and the thickness of a single transparent film is described. We also describe the analytical method for the single absorbing layer of different film thickness. The algorithm for the calculation of the complex amplitude reflection coefficient of the multilayer samples is shown. The effective medium approximation theories of Maxwell-Garnett and Bruggeman are derived starting from the Clausius-Mosotti formula.