Preparation of (Pb,La)(Zr,Ti)O3 Epitaxial Thin Films by Modified Sol–Gel Method and Their Crystallinity Evaluation
Preparation of (Pb,La)(Zr,Ti)O3 Epitaxial Thin Films by Modified Sol–Gel Method and Their Crystallinity Evaluation
复制标题
改进溶胶-凝胶法制备(Pb,La)(Zr,Ti)O3外延薄膜及其结晶度评价
DOI：
10.1143/jjap.46.6933
复制
发表时间：
2007
影响因子：
1.5
通讯作者：
T. Shiosaki
中科院分区：
文献类型：
--
作者：
M. Echizen;T. Nishida;Takashi Nozaka;H. Takeda;K. Uchiyama;T. Shiosaki
由于（Pb，La）（Zr，Ti）O3（PLZT）薄膜在高性能光学器件中的应用前景，其制备方法得到了广泛的研究。我们采用一种新开发的改进的溶胶-凝胶法在蓝宝石衬底上制备了PLZT薄膜，并对薄膜的结晶和光学性能进行了详细的评价。特别讨论了改性工艺与结晶度的关系。通过我们的改进工艺获得的薄膜的结晶取向显着改善，而晶粒尺寸没有扩大。因此，在薄膜中的光损耗也减少了15%，使用修改后的过程。为了研究晶体生长使用的修改后的过程中，通过X射线光电子能谱（XPS）的蓝宝石的表面状态的观察进行。通过表面处理从蓝宝石衬底的表面去除XPS分布图上的Al 2 p。结果表明，有机分子的表面改性是由甲醇过程引起的。结果表明，改性处理对制备高质量PLZT薄膜是有效的。
The preparation of (Pb,La)(Zr,Ti)O3 (PLZT) films has been widely investigated because of the expectation for their application to high-performance optical devices. We prepared PLZT films on sapphire substrates by a newly developed modified sol–gel process with methanol, and the crystalline and optical evaluations of the films were performed in detail. In particular, relationships between the modified process and crystallinity were discussed. The crystalline orientation of the films obtained by our modified process was noticeably improved without enlargement of grain size. Thus, optical loss in the films also decreased by 15% using the modified process. In order to investigate crystal growth using the modified process, the observation of the surface state of sapphire by X-ray photoelectron spectroscopy (XPS) was performed. The Al 2p on the XPS profile from the surface of the sapphire substrate was removed by surface treatment. It was found that the surface modification with organic molecules was caused by the methanol process. From the results, the effectiveness of modification treatments for the preparation of high-quality PLZT films was revealed.
开发用于光电纳米电子应用的 PLZT 薄膜沉积
DOI：
--
发表时间：
2006
期刊：
Integrated Ferroelectrics vol.84
影响因子：
--
作者：
Matsudaira;H.;Umezawa;H.;Kawarada;Yohei Otani;Kiyoshi Uchiyama;K.Uchiyama
通讯作者：
K.Uchiyama