Efficient Piezoelectric Energy Harvesters Utilizing (001) Textured Bimorph PZT Films on Flexible Metal Foils
Efficient Piezoelectric Energy Harvesters Utilizing (001) Textured Bimorph PZT Films on Flexible Metal Foils
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DOI：
10.1002/adfm.201601347
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发表时间：
2016-08-23
影响因子：
19
通讯作者：
Trolier-McKinstry, Susan
中科院分区：
文献类型：
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作者：
Yeo, Hong Goo;Ma, Xiaokun;Trolier-McKinstry, Susan
利用压电能量采集器从低振动频率（< 10赫兹）中提取能量，有望为传感器和可穿戴设备提供持续的自供电。压电柔性机构（PCM）设计通过为其第一模态振型提供均匀应变，从而提供了显着更高的效率，因此对于该应用非常有趣。采用射频磁控溅射技术，在Ni箔上镀上双晶圆Pb(Zr, Ti) O-3 （PZT）薄膜的PCM能量采集器具有高效率和大功率，可用于低频机械振动。特别地，{001}织构PZT薄膜沉积在抛光镍箔的两侧，在HfO2缓冲层上有（100）取向的LaNiO3种子层。研究了有效面积为5.2 cm(2)的PCM在6 Hz左右的各种激励加速度（0.02-0.16 g [g = 9.8 m s(-2)]）下的性能。该PCM器件提供3.9 mW cm(-2) g(2)的功率水平和65%的模态振型效率。
Extracting energy from low vibration frequencies (< 10 Hz) using piezoelectric energy harvester promises continuous self-powering for sensors and wearables. The piezoelectric compliant mechanism (PCM) design provides a signifi cantly higher efficiency by fostering a uniform strain for its 1st mode shape, and so is interesting for this application. In this paper, a PCM energy harvester with bimorph Pb(Zr, Ti) O-3 (PZT) films on Ni foil deposited by rf magnetron sputtering is shown to have high efficiency and large power for low frequency mechanical vibration. In particular, {001} textured PZT films are deposited on both sides of polished Ni foils with (100) oriented LaNiO3 seed layers on HfO2 buffer layers. The performance of PCM with an active area of 5.2 cm(2) is explored for various excitation accelerations (0.02-0.16 g [g = 9.8 m s(-2)]) around 6 Hz. The PCM device provides a power level of 3.9 mW cm(-2) g(2) and 65% mode shape efficiencies.