Nano-Crystalline Diamond Films Grown by Radio-Frequency Inductively Coupled Plasma Jet Enhanced Chemical Vapor Deposition
Nano-Crystalline Diamond Films Grown by Radio-Frequency Inductively Coupled Plasma Jet Enhanced Chemical Vapor Deposition
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DOI：
10.1088/0256-307x/32/8/088104
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发表时间：
2015-09
影响因子：
3.5
通讯作者：
Shi Yan-chao;Lin Jiajun;Liu Hao;Zuo Yong-gang;Baicun Yang;Sun Zhan-feng;Ma Dian-Li;Chen Guangchao-Chen
中科院分区：
文献类型：
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作者：
Shi Yan-chao;Lin Jiajun;Liu Hao;Zuo Yong-gang;Baicun Yang;Sun Zhan-feng;Ma Dian-Li;Chen Guangchao-Chen
利用射频电感耦合等离子体射流生长金刚石薄膜，结合了沉积环境清洁和沉积面积大的优点。在金刚石生长之前，研究了沉积环境的模拟，以了解等离子体的流场和特性。光学发射光谱（OES）也被用于射频等离子体的诊断。等离子体密度ne和电子温度Te分别约为1.0 × 1014 l/cm3和1.4 eV，与模拟计算结果吻合较好。在模拟和实测数据的基础上，确定了生长金刚石薄膜的最佳参数。获得了具有菜花状形貌的纳米晶金刚石。研究了生长膜的结晶特征和杂质。
Radio-frequency inductively coupled plasma jet is utilized to grow diamond films to combine the advantages of clean deposition environment and large deposition area. Before diamond growth, the simulation of deposition environment is studied to understand the flow field and the properties of the plasma. The optical emission spectra (OES) are also applied to diagnose the rf plasma. The plasma density ne and the electron temperature Te deduced from the data measured by OES are about 1.0 × 1014 l/cm3 and 1.4 eV, which are in good agreement with the data calculated in the simulation. Based on the data from both simulation and measurement, the optimized growth parameters are determined to grow diamond films. Nano-crystalline diamond with cauliflower-like morphology is obtained. The crystalline feature and impurity of as-grown films are also studied.