Final report on Key Comparison K67 and parallel Pilot Study P108: Measurement of composition of a thin Fe–Ni alloy film
Final report on Key Comparison K67 and parallel Pilot Study P108: Measurement of composition of a thin Fe–Ni alloy film
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关键比较 K67 和平行试点研究 P108 的最终报告：铁镍合金薄膜成分的测量
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发表时间：
2010
期刊：
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通讯作者：
I. Kojima
中科院分区：
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作者：
K. Kim;Jeong Won Kim;D. Moon;T. Wirth;V. Hodoroaba;Thomas Gross;W. Unger;W. Jordaan;M. V. van Staden;S. Prins;Hai Wang;Xiaoping Song;Lulu Zhang;T. Fujimoto;I. Kojima
在物质数量咨询委员会(CCQM)的表面分析工作组(SAWG)中，已经完成了关于薄膜合金定量分析的关键比较K67和平行试点研究P108。这些实验室间比较的目的是确定国家计量机构(NMI)和指定机构(DIS)在确定合金薄膜成分的测量能力方面的等价性程度。被测量数用原子百分比表示。实验室间比对的参与者可以获得经认证成分的铁镍合金薄膜。它已被用作参考样品，以确定铁和镍的相对灵敏度因数(RSF)，以供参与者使用不同的分析方法来确定测试样品的组成。如前面的先导研究P98所示，参与者的测量能力的等价度可以通过这种方式得到提高。采用同位素稀释法，用电感耦合等离子体质谱(ICPMS)对标准样品的成分进行了鉴定。领先实验室使用C60初级离子的二次离子质谱仪(SIMS)确认了认证标准样品和未知测试样品的深度和横向均匀度，根据元素组成确定了这些样品的深度和横向均一性。五个实验室参加了关键比对。其中4个使用了X射线光电子能谱(XPS)，1个使用了俄歇电子能谱(AES)。一个实验室参与了使用电子探针和能量色散光谱仪(ED EPMA)和X射线光电子能谱(XPS)进行的并行P108试点研究。正文。要查看本文的正文，请点击《最终报告》。请注意，此文本出现在BIPM关键字比较数据库kcdb.bipm.org/的附录B中。根据CIPM相互承认安排(MRA)的规定，最终报告已由CCQM进行同行审查并批准发布。
The Key Comparison K67 and the parallel Pilot Study P108 on quantitative analysis of thin alloy films have been completed in the Surface Analysis Working Group (SAWG) of the Consultative Committee for Amount of Substance (CCQM). The aim of these inter-laboratory comparisons is to determine the degree of equivalence in the measurement capability of national metrology institutes (NMIs) and designated institutes (DIs) for the determination of the composition of thin alloy films. The measurand is expressed in atomic percent. A Fe–Ni alloy film with a certified composition was available for the participants of the inter-laboratory comparison. It has been used as a reference specimen to determine the relative sensitivity factors (RSF) of Fe and Ni for the different analytical methods used by the participants to determine the composition of the test sample. As was shown in the preceding Pilot Study P98, the degrees of equivalence in the measurement capabilities of the participants can be improved in that way. The composition of the reference specimen was certified by inductively coupled plasma mass spectrometry (ICP-MS) using the isotope dilution method. The in-depth and lateral homogeneity, determined in terms of elemental composition, of the certified reference sample and the unknown test sample were confirmed by secondary ion mass spectrometry (SIMS) using C60 primary ions by the leading laboratory. Five laboratories participated in the key comparison. Four of them used x-ray photoelectron spectroscopy (XPS) and one Auger electron spectroscopy (AES). One laboratory participated in the parallel P108 pilot study using electron probe micro analysis with an energy-dispersive spectrometer (ED EPMA) and XPS. Main text. To reach the main text of this paper, click on Final Report. Note that this text is that which appears in Appendix B of the BIPM key comparison database kcdb.bipm.org/. The final report has been peer-reviewed and approved for publication by the CCQM, according to the provisions of the CIPM Mutual Recognition Arrangement (MRA).