Mechanical properties and thermal stability of SiBCN films prepared by ion beam assisted sputter deposition
Mechanical properties and thermal stability of SiBCN films prepared by ion beam assisted sputter deposition
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DOI：
10.1016/j.diamond.2013.02.010
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发表时间：
2013-04
影响因子：
4.1
通讯作者：
Junho Choi;Naohiro Hayashi;Takahisa Kato;M. Kawaguchi
中科院分区：
文献类型：
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作者：
Junho Choi;Naohiro Hayashi;Takahisa Kato;M. Kawaguchi
