Preparation of Ordered Nanohole Arrays with High Aspect Ratios by Anodization of Prepatterned 304 Stainless Steel
Preparation of Ordered Nanohole Arrays with High Aspect Ratios by Anodization of Prepatterned 304 Stainless Steel
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预图案304不锈钢阳极氧化制备高深宽比有序纳米孔阵列
DOI：
10.1149/1945-7111/ac7355
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发表时间：
2022
影响因子：
3.9
通讯作者：
Masuda Hideki
中科院分区：
文献类型：
--
作者：
Yanagishita Takashi;Osada Yuga;Masuda Takuya;Masuda Hideki
通过对304不锈钢进行阳极氧化，可以获得具有高纵横比的周期为63 nm的圆柱形孔的规则阵列的纳米孔阵列结构。结果表明，匹配的凹周期的阳极氧化电压是重要的，以实现具有高的纵横比的纳米孔阵列的制造。这是因为通过在含有0.1M氟化铵的乙二醇中阳极氧化304不锈钢获得的阳极多孔氧化物的孔间距离取决于阳极氧化电压。通过优化制备条件，可以制备出纵横比超过100的高度有序的纳米孔阵列。在本研究中获得的纳米孔阵列是有前途的关键材料，用于制造各种功能器件。
A nanohole array structure with a regular array of cylindrical holes of a high aspect ratio with a period of 63 nm can be obtained by anodizing 304 stainless steel with a concave pattern. It was shown that matching the concave period to the anodization voltage is important to achieving the fabrication of nanohole arrays with a high aspect ratio. This is because the interhole distance of anodic porous oxide obtained by the anodization of 304 stainless steel in ethylene glycol containing 0.1 M ammonium fluoride depends on the anodization voltage. By optimizing the fabrication conditions, it was possible to fabricate highly ordered nanohole arrays with aspect ratios exceeding 100. The nanohole arrays obtained in this study are promising as key materials for fabricating various functional devices.