Innovative measurement of parallelism for parallel transparent plate based on optical scanning holography by using a random-phase pupil.

Innovative measurement of parallelism for parallel transparent plate based on optical scanning holography by using a random-phase pupil.
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DOI:
10.1364/ao.54.002483
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发表时间:
2015-03
期刊:
影响因子:
1.9
通讯作者:
Luo-Zhi Zhang;Jian-Ping Hu;Dao-Ming Wan;Zeng Xing;Chun-Miao Li;Zhou. Xin
Luo-Zhi Zhang;Jian-Ping Hu;Dao-Ming Wan;Zeng Xing;Chun-Miao Li;Zhou. Xin
中科院分区:
工程技术4区
文献类型:
--
作者:
Luo-Zhi Zhang;Jian-Ping Hu;Dao-Ming Wan;Zeng Xing;Chun-Miao Li;Zhou. Xin

文献摘要

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提出了一种利用随机位相光瞳的光学扫描全息术(OSH)测量平行透明平板平行度的方法,该方法与传统方法有很大的不同,具有较高的下限和测量过程。作为OSH的一种新的可能应用,从理论上证明了该方法的可行性,并在2 cm×2 cm的平行板上进行了数值模拟。文中还讨论了与样本平行度密切相关的重建图像质量和局部均方误差。这些量可以成为平行度的判断,而在大多数干涉方法中,判断是两个干涉条纹之间的步长。此外,随机相位光瞳的随机性也会影响重建图像的质量和局部均方误差。根据仿真结果,高并行度通常带来可区分的重构信息和抑制局部均方误差。
A potential method is proposed to measure the parallelism of parallel transparent plate with an advanced lower limit and a convenient process by optical scanning holography (OSH) using a random-phase pupil, which is largely distinct from traditional methods. As a new possible application of OSH, this promising method is demonstrated theoretically and numerical simulations are carried out on a 2 cm×2 cm parallel plate. Discussions are also made on the quality of reconstructed image as well as local mean square error (MSE), which are closely related with the parallelism of sample. These amounts may become the judgments of parallelism, while in most interference methods judgments are paces between two interference fringes. In addition, randomness of random-phase pupil also affects the quality of reconstructed image and local MSE. According to the simulation results, high parallelism usually brings about distinguishable reconstructed information and suppressed local MSE.