Sub-unit cell layer-by-layer growth of Fe3O4, MgO, and Sr2RuO4 thin films
Sub-unit cell layer-by-layer growth of Fe3O4, MgO, and Sr2RuO4 thin films
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Fe3O4、MgO 和 Sr2RuO4 薄膜的亚晶胞逐层生长
DOI：
10.1007/s00339-003-2105-9
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发表时间：
2002
期刊：
影响因子：
--
通讯作者：
R. Gross
中科院分区：
文献类型：
--
作者：
D. Reisinger;B. Blass;J. Klein;J. Philipp;M. Schonecke;A. Erb;L. Alff;R. Gross
氧化物电子器件中氧化物材料的使用需要其受控外延生长。最近，研究表明，即使在高氧压力下，反射高能电子衍射 (RHEED) 也可以监测氧化物薄膜的生长。在这里，我们报告了使用脉冲激光沉积 (PLD) 从化学计量靶材中氧化物材料 Sr2RuO4、MgO 和磁铁矿的亚晶胞分子或块层生长。虽然单个 RHEED 强度振荡被发现对应于钙钛矿（如 SrTiO3 或掺杂 LaMnO3）的单个晶胞的生长，但在晶胞由具有相同化学计量的多个分子层或块组成的材料中，建立了亚晶胞分子或块层生长，导致在单个晶胞的生长过程中产生多个 RHEED 强度振荡。
The use of oxide materials in oxide electronics requires their controlled epitaxial growth. Recently, it was shown that Reflection High Energy Electron Diffraction (RHEED) allows the growth of oxide thin films to be monitored, even at high oxygen pressures. Here, we report the sub-unit cell molecular or block layer growth of the oxide materials Sr2RuO4, MgO, and magnetite using Pulsed Laser Deposition (PLD) from stoichiometric targets. Whereas a single RHEED intensity oscillation is found to correspond to the growth of a single unit cell for perovskites such as SrTiO3 or doped LaMnO3, in materials where the unit cell is composed of several molecular layers or blocks with identical stoichiometry, sub-unit cell molecular or block layer growth is established, resulting in several RHEED intensity oscillations during the growth of a single unit cell.