Production and characterization of polymer microcantilevers

Production and characterization of polymer microcantilevers
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DOI:
10.1063/1.1777387
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发表时间:
2004-08
影响因子:
1.6
通讯作者:
Andrew W. Mcfarland;M. Poggi;L. Bottomley;J. Colton
Andrew W. Mcfarland;M. Poggi;L. Bottomley;J. Colton
中科院分区:
工程技术4区
文献类型:
--
作者:
Andrew W. Mcfarland;M. Poggi;L. Bottomley;J. Colton

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这项工作描述了通过溶剂浇注技术生产微悬臂梁。产生的梁的尺寸约为500x50x2μm(分别为长度、宽度和厚度)。对产生的光束的一部分进行了表征,并显示出与现有的陶瓷和光聚合物微悬臂梁具有类似的动态力学行为。
This work describes the production of microcantilever beams via a solvent casting technique. The beams produced had dimensions of roughly 500 by 50 by 2 μm (length, width, and thickness, respectively). A subset of the beams produced were characterized and were shown to have comparable dynamic mechanical behavior as that of existing ceramic and photopolymer microcantilevers.