Surface shape measurement of transparent planar elements with phase measuring deflectometry
Surface shape measurement of transparent planar elements with phase measuring deflectometry
复制标题
使用相位测量偏转法测量透明平面元件的表面形状
DOI：
10.1117/1.oe.57.10.104104
复制
发表时间：
2018-10-01
影响因子：
1.3
通讯作者：
Wang, Qionghua
中科院分区：
文献类型：
--
作者：
Wang, Ruiyang;Li, Dahai;Wang, Qionghua
抽象。采用结构光投影和相移技术的相位测量偏转测量法（PMD）是一种基于反射定律的高精度光学表面测量方法。通常，对于透明平面元件的表面形状测量，PMD遭受寄生反射。为了避免寄生反射的影响，提出了一种基于条纹频率调谐和傅里叶变换的方法。数值模拟和实验都进行了评估所提出的方法的性能。给出了实验结果。将该方法与传统相移算法和斐索干涉仪测量的表面形貌进行了比较。测量厚度为24.5mm的光学平面元件和厚度为10mm的平面窗口玻璃。对于光学元件，所提出的方法是准确的，测量误差在200 nm的PV。对于窗玻璃，该方法比传统的相移算法得到更好的表面轮廓。
Abstract. Phase measuring deflectometry (PMD) with structured light projection and phase-shifting technique is a highly accurate optical surface measuring method based on the law of reflection. Generally, for surface shape measurement of transparent planar elements, PMD suffers from parasitic reflection. To avoid the unexpected effect of parasitic reflection, a method based on fringe frequency tuning and Fourier-transform is introduced. Numerical simulations and experiments are both conducted to evaluate the performance of the proposed method. Experiment results are shown. Surface figures measured using the proposed method are compared with those measured using traditional phase-shifting algorithm and Fizeau interferometer. Both an optical planar element with a thickness of 24.5 mm and a planar window glass with a thickness of 10 mm are measured. For the optical element, the proposed method is accurate and the measurement error is within 200-nm PV. For window glass, the proposed method yields a better surface figure than the traditional phase-shifting algorithm does.