Capacitive micromachined ultrasonic transducers with novel membrane design
Capacitive micromachined ultrasonic transducers with novel membrane design
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具有新颖薄膜设计的电容式微机械超声波换能器
DOI：
10.1016/j.proche.2009.07.097
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发表时间：
2009
期刊：
影响因子：
--
通讯作者：
O. Tabata
中科院分区：
文献类型：
--
作者：
M. Sato;Y. Hirai;K. Sugano;T. Tsuchiya;O. Tabata
提出了一种用于电容式微机械超声换能器(CMUT)的新型薄膜设计。该设计由厚膜和加强梁组成，由环向薄膜支撑，在不降低膜共振频率的情况下提高换能器的灵敏度。推导了该设计灵敏度的解析公式，并通过有限元分析验证了其有效性。分析表明，这种厚膜结构在保持谐振频率不变的情况下，将厚膜部分的质量减少了70%，灵敏度提高了3倍。
This paper presents a novel membrane design for capacitive micromachined ultrasonic transducers (cMUTs). The proposed design is composed of a thick membrane with reinforcing beams supported by a circumferential thin membrane to improve transducer sensitivity without degrading the membrane resonance frequency. Analytical formulation of sensitivity for the proposed design was newly derived and its validity was verified by finite element analysis (FEA). From the analysis, we confirmed that this thick membrane structure achieved three times higher sensitivity compared to the conventional design by decreasing 70 % of the mass of the thick membrane part with keeping the resonance frequency same.