Electrostatic Comb Drive Levitation And Control Method
Electrostatic Comb Drive Levitation And Control Method
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DOI：
10.1109/jmems.1992.752508
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发表时间：
1992-12
期刊：
影响因子：
--
通讯作者：
W. Tang;M. G. Lim;R. Howe
中科院分区：
文献类型：
--
作者：
W. Tang;M. G. Lim;R. Howe
本文介绍了理论，模拟结果和实验研究的悬浮力（垂直于基板）与叉指电容（静电梳）横向致动器。对于顺应性悬浮液，正常位移超过2 /spl μ/m的梳状偏置为30 V的观察。这种现象是由于在悬挂结构顶部上感应的静电吸引。通过电隔离交替的驱动梳齿指状物并施加大小相等且符号相反的电压，悬浮力可以减小一个数量级，同时将横向驱动力减小小于2倍。悬浮理论结合了静电模拟结果，并与实验数据吻合良好。
This paper presents the theory, simulation results, and experimental study of the levitating force (normal to the substrate) associated with Interdigitated capacitor (electro static comb) lateral actuators. For compliant suspensions, normal displacements of over 2 /spl mu/m for a comb bias of 30 V are observed. This phenomenon is due to electrostatic attraction induced on top of the suspended structure. By electrically lsolating alternating drive-comb fingers and applying voltages of equal magnitude and opposite sign, levitation force can be reduced by an order of magnitude, while reducing the lateral drive force by less than a factor of 2. The levitation theory incorporates electrostatic simulation results, and agrees well with experimental data.