Accurate measurements of the acoustical physical constants of synthetic α-quartz for SAW devices
Accurate measurements of the acoustical physical constants of synthetic α-quartz for SAW devices
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DOI：
10.1109/58.981390
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发表时间：
2002-01-01
影响因子：
3.6
通讯作者：
Nishiyama, S
中科院分区：
文献类型：
--
作者：
Kushibiki, J;Takanaga, I;Nishiyama, S
报道了对市售和广泛使用的声表面波(SAW)级合成α-石英的声学物理常数(弹性常数、压电常数、介电常数和密度)的精确测量。通过数值计算，选择了准确测定常数的最佳体波传播方向和传播模式，并从单晶锭中制备了三个主X、Y、Z切试件和几个旋转Y切试件，以测定常数并验证其准确性。所有的常数都是通过对纵向速度、剪切速度、介电常数和密度的高精度测量来确定的。未用来确定常数的样品测得的速度值与由测定的常数计算的速度值吻合得很好，相差+/-0.20m/S(+/-0.004%)。
Accurate measurements of the acoustical physical constants (elastic constants, piezoelectric constants, dielectric constants, and density) of commercially available and widely used surface acoustic wave (SAW)-grade synthetic alpha-quartz are reported. The propagation directions and modes of bulk waves optimal for accurately determining the constants were selected through numerical calculations, and three principal X-, Y-, and Z-cut specimens and several rotated Y-cut specimens were prepared from a single crystal ingot to determine the constants and to confirm their accuracy. All of the constants were determined through highly accurate measurements of the longitudinal velocities, shear velocities, dielectric constants, and density. The velocity values measured for the specimens that were not used to determine the constants agreed well with those calculated from the determined constants, within a difference of +/-0.20 m/s (+/-0.004%).