A study of the characteristics for electrochemical micromachining with ultrashort voltage pulses
A study of the characteristics for electrochemical micromachining with ultrashort voltage pulses
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DOI：
10.1007/s00170-005-0247-y
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发表时间：
2007-01-01
影响因子：
3.4
通讯作者：
Cho, C. R.
中科院分区：
文献类型：
--
作者：
Lee, E. S.;Baek, S. Y.;Cho, C. R.
电化学微加工（EMM）传统上用于高度专业化的领域，如航空航天和国防工业。它现在越来越多地应用于其他行业，其中需要难以切割的材料，复杂的几何形状和摩擦学以及微观尺度的设备。电解金属加工通常不被认为是一个精密的过程，本文提出。在电化学环境中，在工具电极和工件之间施加电压脉冲允许以微米精度对导电材料进行三维加工。在本文中，工具电极（直径5 μ m，长度为1毫米）的电解金属加工和微孔制造使用这些工具电极。利用超短电压脉冲（1-5 μ s）可以精确地获得直径小于50 μ m的微孔。
Electrochemical micromachining (EMM) has traditionally been used in highly specialized fields, such as those of the aerospace and defense industries. It is now increasingly being applied in other industries, where parts with difficult-to-cut material, complex geometry and tribology, and devices of microscopic-scale are required. EMM, which is not normally considered as a precision process, is presented in this paper. The application of voltage pulses between a tool electrode and a workpiece in an electrochemical environment allows the three-dimensional machining of conducting materials with micrometer precision. In this paper, tool electrodes (5 mu m in diameter, 1 mm in length) are developed by EMM and microholes are manufactured using these tool electrodes. Microholes with a size of below 50 mu m in diameter can be accurately achieved by using ultrashort voltage pulses (1-5 mu s).