Characteristic behavior of Pt-based metallic glass under rapid heating and its application to microforming
Characteristic behavior of Pt-based metallic glass under rapid heating and its application to microforming
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DOI：
10.1016/j.msea.2003.10.173
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发表时间：
2004-07-15
期刊：
影响因子：
6.4
通讯作者：
Inoue, A
中科院分区：
文献类型：
--
作者：
Saotome, Y;Noguchi, Y;Inoue, A
在本文中，我们研究了Pt48.75Pd9.75Cu19.5P22金属玻璃在快速加热过程中的特性行为。我们首先通过感应加热以高达 100 K/s 的速率快速加热直径 2 mm、高度 5 匝的圆柱形样品。在加热过程中，玻璃化转变温度T-g和结晶温度T-x随着加热速率的增加而增加。该材料在过冷液体温度范围内表现出牛顿粘性流动，并且法向粘度随着加热速率的增加而降低。在加热速率为 100 K/s 时，标准粘度为 2 x 10(3) Pa s。我们开发了一种新的微成型系统作为这种现象的应用。该系统由用于箔片样品的快速电阻加热装置、玻璃化转变检测器、用于驱动工具的线性致动器以及相关的控制电路组成。使用该设备，我们在 30 秒内将三维微观形状转移到材料上。传统的超塑性锻造系统需要很长时间来加热工件并使其变形。因此，所开发的系统有助于微机电系统（MEMS）微型零件的大规模生产。 (C) 2003 Elsevier B.V. 保留所有权利。
In this paper, we studied characteristic behavior Of Pt48.75Pd9.75Cu19.5P22 metallic glass during rapid heating. We first rapidly heated a cylindrical specimen of 2 mm in diameter and 5 turn in height by induction heating at a rate of up to 100 K/s. During the heating, glass transition temperature T-g and the crystallization temperature T-x increase with increasing heating rate. The material exhibits a Newtonian viscous flow in the supercooled liquid temperature range, and the normal viscosity decreases with increasing heating rate. The normal viscosity is 2 x 10(3) Pa s at a heating rate of 100 K/s. We developed a new microforming system as an application of this phenomenon. The system consists of a rapid resistance-heating unit for foil specimens, a glass transition detector, a linear actuator for driving a tool, and the associated control circuits. With this apparatus, we transferred a three-dimensional micro-shape to the materials within 30 s. A conventional superplastic forging system requires a long time to heat work specimens and to deform them. The developed system thus facilitates mass production of micro parts for micro electromechanical systems (MEMS). (C) 2003 Elsevier B.V. All rights reserved.