Highly Sensitive Thin Film Sensor Using Coplanar Line
Highly Sensitive Thin Film Sensor Using Coplanar Line
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DOI：
10.3379/msjmag.1404r002
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发表时间：
2014-05
影响因子：
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通讯作者：
H. Uetake;S. Yabukami;T. Chiba;T. Ozawa;H. Suzuki;N. Kobayashi;K. Arai
中科院分区：
文献类型：
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作者：
H. Uetake;S. Yabukami;T. Chiba;T. Ozawa;H. Suzuki;N. Kobayashi;K. Arai
传感器5)可在室温下工作；然而，它们的规模相对较大，因此很难将它们集成到传感器阵列中。在室温下工作的高灵敏度磁场薄膜传感器可用于生物医学应用或无损评估。因此，开发一种在室温下测量生物磁信号的薄膜传感器是本研究的目的。正如之前报道的那样，一种共面线型薄膜传感器与陶瓷衬底（1r = 115），以提高相位变化的灵敏度(6)，并成功地用于获得多点的心磁图（mcg）(7)。高介电常数的陶瓷衬底使载流子的波长减小，在小场作用下相位发生显著变化。然而，传感器体积庞大，无法集成。在本研究中，我们开发了一种由磁性薄膜、介电薄膜和导电薄膜组成的薄膜集成传感器。这些结构可以很容易地开发出具有相同特性的阵列传感器。本研究的目的是获得一种具有良好特性的传感器（相位变化> - 100度/Oe，增益> -40 dB），用于获得心磁图7)。
sensor5) can be operated at room temperature; however, they are comparatively large in scale, making it difficult to integrate them in a sensor array. Highly sensitive magnetic field thin film sensors operating at room temperature are useful for biomedical applications or nondestructive evaluation. Thus, development of a thin film sensor to measure biomagnetic signals at room temperature was the aim of this study. As previously reported, a coplanar line-type thin film sensor with a ceramic substrate (r = 115) to enhance sensitivity of phase change was developed 6) and successfully used to obtain magnetocardiograms (MCGs) at multiple points7). The ceramic substrate with high permittivity decreases the wave length of the carrier, the phase dramatically changing when a small field is applied. However the sensor is bulky and cannot be integrated. In the present study, we developed a thin film integrated sensor including magnetic thin film, dielectric film and conductive film. These structure can be easily developed for array sensors with the same characteristics. The goal of this study was to obtain a sensor with good characteristics (phase change > 100 degree/Oe, gain > -40 dB) for obtaining magnetocardiograms 7) .