Investigation of an optical sensor for small tilt angle detection of a precision linear stage
Investigation of an optical sensor for small tilt angle detection of a precision linear stage
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DOI：
10.1088/0957-0233/21/5/054006
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发表时间：
2010-05-01
影响因子：
2.4
通讯作者：
Gao, Wei
中科院分区：
文献类型：
--
作者：
Saito, Yusuke;Arai, Yoshikazu;Gao, Wei
本文给出了基于激光自准直方法的角度传感器在精密线性舞台小倾角检测中的特性评价结果。该传感器由激光二极管（LD）作为光源，四象限光电二极管（QPD）作为位置传感检测器组成。在平台的移动台上安装一个小平面反射镜作为传感器的目标反射镜。该光学系统具有灵敏度高、响应速度快、两轴角度检测能力强等优点。另一方面，传感器的灵敏度取决于聚焦在QPD上的光斑的大小，这是投射到目标镜上的激光束直径的函数。由于直径受激光束发散的影响，本文重点研究了传感器灵敏度与目标反射镜的运动位置（传感器工作距离）在舞台运动行程上的关系。讨论了影响传感器灵敏度的主要误差分量，分析了传感器光学系统的最佳工作条件。给出了有效工作距离评定的实验结果。
This paper presents evaluation results of the characteristics of the angle sensor based on the laser autocollimation method for small tilt angle detection of a precision linear stage. The sensor consists of a laser diode (LD) as the light source, and a quadrant photodiode (QPD) as the position-sensing detector. A small plane mirror is mounted on the moving table of the stage as a target mirror for the sensor. This optical system has advantages of high sensitivity, fast response speed and the ability for two-axis angle detection. On the other hand, the sensitivity of the sensor is determined by the size of the optical spot focused on the QPD, which is a function of the diameter of the laser beam projected onto the target mirror. Because the diameter is influenced by the divergence of the laser beam, this paper focuses on the relationship between the sensor sensitivity and the moving position of the target mirror (sensor working distance) over the moving stroke of the stage. The main error components that influence the sensor sensitivity are discussed and the optimal conditions of the optical system of the sensor are analyzed. The experimental result about evaluation of the effective working distance is also presented.