Influence of Post Annealing Treatment on Fixed Charge State and Chemical Bonding State of Sr-silicate Film
Influence of Post Annealing Treatment on Fixed Charge State and Chemical Bonding State of Sr-silicate Film
复制标题
后退火处理对硅酸锶薄膜固定电荷态和化学键态的影响
DOI:
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发表时间:
2016
期刊:
影响因子:
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通讯作者:
Y. Hotta
中科院分区:
文献类型:
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作者:
S. Taniwaki;Mitsuhiro Umano;H. Yoshida;K. Arafune;S. Satoh;Y. Hotta