Fabrication of a SiO2 optical window for controlling light transmission
Fabrication of a SiO2 optical window for controlling light transmission
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DOI：
10.1007/s00542-016-2826-2
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发表时间：
2017-04-01
影响因子：
2.1
通讯作者：
Ono, Takahito
中科院分区：
文献类型：
--
作者：
Nguyen Van Toan;Sangu, Suguru;Ono, Takahito
本文重点研究了SiO2光学窗口中的压应力减小问题。报道了一种用于图象传感的光调制器光学窗口的设计和制作。光学窗口由微米级SiO2毛细管（多孔固体）组成，可以通过将液体移入和移出多孔固体来调制透射光强度。当液体渗透到多孔固体中时，由于折射率匹配，可以实现高的光学透射率。另外，由于气孔和毛细管壁对光的反射和散射，其透光率较低。通过深反应离子刻蚀工艺制造的硅毛细管被完全氧化以形成SiO2毛细管。氧化物的大的压应力引起毛细管结构的弯曲，这通过使用薄的支撑梁来减小。成功地制造了一个7.2 mm x 9.6 mm的光学窗口区域，与图像传感器完全集成，并在可见光区（波长范围从450到650 nm）清楚地证明了依赖于液体渗透的光调制效应。
This paper focuses on the compressive stress reduction in a SiO2 optical window. The design and fabrication of the optical window for an optical modulator toward image sensing applications are reported. The optical window consists of micrometer-order SiO2 capillaries (porous solids) that can modulate the transmission light intensity by moving a liquid in and out of the porous solid. A high optical transmittance can be achieved due to refractive index matching when the liquid is penetrated into the porous solid. Otherwise, its light transmittance is low because of light reflection and scattering by air holes and capillary walls. Silicon capillaries fabricated by deep reactive ion etching process are completely oxidized to form the SiO2 capillaries. A large compressive stress of the oxide causes bending of the capillary structure, which is reduced by using thin supporting beams. A 7.2 mm x 9.6 mm optical window area toward a fully integrated with the image sensor is successfully fabricated, and a light modulation effect dependent on liquid penetration is clearly demonstrated in visible region (wavelength range from 450 to 650 nm).