An electromechanical material testing system for in situ electron microscopy and applications
An electromechanical material testing system for in situ electron microscopy and applications
复制标题
DOI：
10.1073/pnas.0506544102
复制
发表时间：
2005-10-11
影响因子：
11.1
通讯作者：
Espinosa, HD
中科院分区：
文献类型：
--
作者：
Zhu, Y;Espinosa, HD
我们报告的材料测试系统的发展，在原位电子显微镜（EM）的纳米结构的机械测试。该测试系统由一个驱动器和一个负载传感器制造的表面微机械加工的手段。这种以前从未描述过的纳米级材料测试系统可以连续观察样品变形和亚纳米分辨率的故障，同时以纳米分辨率电子测量施加的负载。这一成就是通过基于微机电系统技术的机电和热机械部件的集成而实现的。该系统的能力证明了独立的多晶硅膜，金属纳米线，和碳纳米管的原位EM测试。特别是，一个以前未列出的实时仪器原位透射电镜观察碳纳米管拉伸载荷下的故障。
We report the development of a material testing system for in situ electron microscopy (EM) mechanical testing of nanostructures. The testing system consists of an actuator and a load sensor fabricated by means of surface micromachining. This previously undescribed nanoscale material testing system makes possible continuous observation of the specimen deformation and failure with subnanometer resolution, while simultaneously measuring the applied load electronically with nanonewton resolution. This achievement was made possible by the integration of electromechanical and thermomechanical components based on microelectromechanical system technology. The system capabilities are demonstrated by the in situ EM testing of free-standing polysilicon films, metallic nanowires, and carbon nanotubes. In particular, a previously unclescribed real-time instrumented in situ transmission EM observation of carbon nanotubes failure under tensile load is presented here.