Evaluation and criterion determination of the low-k thin film adhesion by the surface acoustic waves with cohesive zone model
Evaluation and criterion determination of the low-k thin film adhesion by the surface acoustic waves with cohesive zone model
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DOI：
10.1016/j.apsusc.2016.12.005
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发表时间：
2017-03
影响因子：
6.7
通讯作者：
X. Xiao;Haiyang Qi;Xiaole Sui;T. Kikkawa
中科院分区：
文献类型：
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作者：
X. Xiao;Haiyang Qi;Xiaole Sui;T. Kikkawa
将内聚区模型（CZM）引入到声表面波（SAW）技术中，用于表征硅基低k薄膜的界面结合特性。推导了CZM中最大法向牵引力和法向界面特征长度两个参数的比值，定量评价了界面粘结性能。本研究通过CZM-SAW技术新提出了判断粘附性能的粘附准则。本文介绍了两种不同膜厚的致密和多孔黑金刚石膜的判据确定过程。利用CZM声表面波技术对不同厚度的致密和多孔黑金刚石膜的界面结合性能进行了定量和无损评价。通过拟合最大频率为220 MHz的实验色散曲线与理论色散曲线，得到了定量的粘附特性。非破坏性的CZM-SAW技术和破坏性的纳米划痕的结果表现出相同的趋势，在粘附性能，这意味着CZM-SAW技术是一种很有前途的方法，用于确定界面粘附。同时，根据确定的标准对被测样品的粘附性能进行了判断。测试结果表明，不同的测试膜材料，不同的膜厚，从300 nm到1000 nm，在不同的粘附条件下。本文展示了CZM-SAW技术的优点，它可以成为一种通用的方法来表征膜的附着力。
The cohesive zone model (CZM) is introduced in the surface acoustic wave (SAW) technique to characterize the interfacial adhesion property of the low-kthin film deposited on the Silicon substrate. The ratio of the two parameters in the CZM, the maximum normal traction and normal interface characteristic length, is derived to evaluate the interfacial adhesion properties quantitatively. In this study, the adhesion criterion to judge the adhesion property is newly proposed by the CZM-SAW technique. The criterion determination processes of two kinds of film, dense and porous Black Diamond with different film thicknesses, are presented in this paper. The interfacial adhesion properties of the dense and porous Black Diamond films with different thicknesses are evaluated by the CZM-SAW technique quantitatively and nondestructively. The quantitative adhesion properties are obtained by fitting the experimental dispersion curves with maximum frequency up to 220 MHz with the theoretical ones. Results of the nondestructive CZM-SAW technique and the destructive nanoscratch exhibit the same trend in adhesion properties, which means that the CZM-SAW technique is a promising method for determining the interfacial adhesion. Meanwhile, the adhesion properties of the detected samples are judged by the determined criterion. The test results show that different test film materials with different film thicknesses ranging from 300 nm to 1000 nm are in different adhered conditions. This paper exhibits the advantage of the CZM-SAW technique which can be a universal method to characterize the film adhesion.