Metamaterial-Based Terahertz Imaging
Metamaterial-Based Terahertz Imaging
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DOI：
10.1109/tthz.2015.2463673
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发表时间：
2015-11-01
影响因子：
3.2
通讯作者：
Cumming, David R. S.
中科院分区：
文献类型：
--
作者：
Carranza, Ivonne Escorcia;Grant, James;Cumming, David R. S.
介绍了一种创新的、低成本、非致冷、基于超材料的太赫兹焦平面阵列的设计。单像素由谐振超材料吸收体和微测辐射热计传感器组成，集成在标准的180 nm cmos工艺中。这种超材料是直接在六层金属工艺的金属和绝缘层中制造的。太赫兹吸收是由超材料吸波材料的几何形状决定的，这种吸波材料可以为不同的频率定制。最初的原型由一个像素大小为30微米×30微米的55像素阵列组成，并且可以很容易地扩展到更具商业可行性的阵列大小。通过扫描隐藏在马尼拉信封中的金属物体，在传输和反射模式实验中展示了FPA成像能力。
This paper presents the design of an innovative, low-cost, uncooled, metamaterial-based terahertz (THz) focal plane array (FPA). A single pixel is composed of a resonant metamaterial absorber and micro-bolometer sensor integrated in a standard 180 nm CMOS process. The metamaterial is made directly in the metallic and insulating layers available in the six metal layer CMOS foundry process. THz absorption is determined by the geometry of the metamaterial absorber which can be customized for different frequencies. The initial prototype consists of a 5 5 pixel array with a pixel size of 30 mu m x 30 mu m and is readily scalable to more commercially viable array sizes. The FPA imaging capability is demonstrated in a transmission and reflection mode experiment by scanning a metallic object hidden in a manila envelope.