Design of a six-axis micro-scale nanopositioner -: μHexFlex
Design of a six-axis micro-scale nanopositioner -: μHexFlex
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DOI：
10.1016/j.precisioneng.2005.11.002
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发表时间：
2006-07-01
影响因子：
3.6
通讯作者：
Culpepper, Martin L.
中科院分区：
文献类型：
--
作者：
Chen, Shih-Chi;Culpepper, Martin L.
介绍了一种小型纳米定位机器人Mu HexFlex的设计，它由一个六轴柔性机构和三对两轴热力机械微驱动器组成。在本文中，我们涵盖了Mu HexFlex的建模、设计和制造。重点研究了：(1)基于约束的设计方法在柔顺机构设计中的应用；(2)执行器的建模；(3)连接执行器输入和机构响应的系统模型。测量的3朗姆直径原型的准静态性能显示，最大射程为8.4微米×12.8微米×8.8微米和19.2Mrad×17.5Mrad×33.2 Mrad(1.1度x 1.0度×1.9度)。实验结果表明，一个恒定的机械/电学材料特性系统模型可用于预测3.0×4.4×3.0×6.3mrad×6.3mrad×8.7mrad(0.36度×0.36度×0.5度)范围内的位置和取向。对该装置的动态特性进行了实验研究。实验结果表明，其最低固有频率为4 kHz。在1埃/mV下测量了器件的分辨特性。器件是用深反应离子刻蚀(DRIE)制作的。每台设备的批量制造成本估计不到2美元。(C)2005 Elsevier Inc.保留所有权利。
This paper presents the design of a small-scale nanopositioner, the mu HexFlex, which is comprised of a six-axis compliant mechanism and three pairs of two-axis thermo-mechanical micro-actuators. In this paper, we cover the modeling, design and fabrication of the mu HexFlex. Specific attention is given to: (1) the use of constraint-based design in generating the compliant mechanism design, (2) the modeling of the actuators, and (3) the system model which links the actuator input and mechanism response. The measured, quasi-static performance of a 3 rum diameter prototype shows a maximum range of 8.4 mu m x 12.8 mu m x 8.8 mu m and 19.2 mrad x 17.5 mrad x 33.2 mrad (1.1 degrees x 1.0 degrees x 1.9 degrees). Experimental results indicate that a constant mechanical/electrical material property system model may be used to predict the position and orientation over a range of 3.0 mu m x 4.4 mu m x 3.0 mu m and 6.3 mrad x 6.3 mrad x 8.7 mrad (0.36 degrees x 0.36 degrees x 0.5 degrees). The dynamic characteristics of the device were investigated experimentally. Experimental results show a lowest natural frequency of 4 kHz. The resolution characteristics of the device have been measured at 1 angstrom/mV The device was created using deep reactive ion etching (DRIE). Bulk fabrication costs are estimated at less than $ 2 per device. (c) 2005 Elsevier Inc. All rights reserved.