Rainbow actuators and sensors: a new smart technology
Rainbow actuators and sensors: a new smart technology
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DOI：
10.1117/12.267101
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发表时间：
1997-02
期刊：
影响因子：
--
通讯作者：
G. Haertling
中科院分区：
文献类型：
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作者：
G. Haertling
铁电、压电、电致伸缩和反铁电陶瓷致动器技术的最新发展清楚地表明，定位器、调平器、泵、无振动结构和变焦元件等未来应用所需的材料将需要比目前可用的材料更复杂（多功能和智能）、更经济和具有更高程度的性能。一种最近开发的用于在这些材料中产生显著高于正常位移的方法被称为RAINBOW（还原和内部偏置氧化物晶片）技术。这个首字母缩略词表示Rainbow器件的基本有源结构，它是通过特殊的高温化学还原工艺生产的。在最基本的意义上，Rainbow可以被认为是一种预应力、整体式、轴向模式弯曲机;然而，由于其独特的圆顶或鞍形配置，它能够产生更高的位移（根据尺寸可达几毫米），并承受中等载荷（根据厚度可达10公斤），而不是普通的弯曲机，如单压电晶片和双压电晶片。描述了生产和表征这种彩虹的技术以及通过用于增加线性位移的堆叠致动器和用于在诸如智能蒙皮、自调平结构和可变形涂层的广域应用中增强覆盖的矩阵阵列来增加其效用的方法。
Recent developments in the technology of ferroelectric, piezoelectric, electrostrictive and antiferroelectric ceramic actuators have clearly demonstrated that the materials required for future applications such as positioners, levelers, pumps, vibration-free structures and variable-focus elements will need to be more sophisticated (multifunctional and smart), more economical and possess a higher degree of performance than presently available. One recently developed method for producing considerably higher- than-normal displacement in these materials is known as the RAINBOW (Reduced and INternally Biased Oxide Wafer) technology. This acronym denotes the basic active structure of the Rainbow device which is produced by a special high temperature chemical reduction process. In its most basic sense, a Rainbow can be considered to be a pre-stressed, monolithic, axial-mode bender; however, because of its unique dome or saddle-shaped configuration, it is able to produce much higher displacements (up to several mm depending on size) and sustain moderate loads (up to 10 kg depending on thickness) than normal benders such as unimorphs and bimorphs. The technology of producing and characterizing such Rainbows as well as methods for increasing their utility by means of stacked actuators for increased linear displacement and matrix arrays for enhanced coverage in wide-area applications such as smart skins, autoleveling structures and deformable coatings are described.