EFFECTS OF SURFACE ROUGHNESS OF SUBSTRATES ON THE C-AXIS PREFERRED ORIENTATION OF ZNO FILMS DEPOSITED BY R.F. MAGNETRON SPUTTERING
EFFECTS OF SURFACE ROUGHNESS OF SUBSTRATES ON THE C-AXIS PREFERRED ORIENTATION OF ZNO FILMS DEPOSITED BY R.F. MAGNETRON SPUTTERING
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DOI：
10.1016/s0040-6090(02)00977-x
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发表时间：
2003-01
期刊：
影响因子：
2.1
通讯作者：
Jae Bin Lee;S. Kwak;H. Kim
中科院分区：
文献类型：
--
作者：
Jae Bin Lee;S. Kwak;H. Kim
