Characterization of dip-coated ITO films derived from nanoparticles synthesized by␣low-pressure spray pyrolysis
Characterization of dip-coated ITO films derived from nanoparticles synthesized by␣low-pressure spray pyrolysis
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DOI：
10.1007/s11051-005-9006-0
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发表时间：
2006-04
影响因子：
2.5
通讯作者：
T. Ogi;Ferry Iskandar;Y. Itoh;K. Okuyama
中科院分区：
文献类型：
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作者：
T. Ogi;Ferry Iskandar;Y. Itoh;K. Okuyama
In 2 O3：Sn（氧化铟锡; ITO）膜由具有高度结晶的ITO纳米颗粒（尺寸小于20 nm，具有10 at.% Sn），其已经通过低压喷雾热解（LPSP）在单一步骤中制备。通过将LPSP制备的ITO纳米颗粒分散到超纯水中来制备ITO溶胶溶液。纳米ITO薄膜沉积在玻璃基板上使用浸涂方法，然后在空气中在各种温度下退火。通过UV-Vis光谱法测量ITO膜的光学透射率，并且发现该膜对可见光具有高的透明性（在400°C下退火的250 nm的膜厚度的情况下，在λ=450-800 nm的范围内透明性超过95%，在λ=700 nm以上的波长处具有接近100%的最大值）。薄膜的透光率受所用ITO颗粒的尺寸、薄膜厚度和退火温度的影响。ITO薄膜的最小电阻率为9.5×10−2Ω cm，其电阻率受ITO颗粒尺寸和退火温度的影响。
In2O3:Sn (Indium Tin Oxide; ITO) films were prepared from a sol solution with highly crystalline ITO nanoparticles (less than 20 nm in size with 10 at.% Sn) which had been prepared by low-pressure spray pyrolysis (LPSP) in a single step. The ITO sol solution was prepared by dispersing LPSP-prepared ITO nanoparticles into ultra pure water. The nanoparticle ITO film was deposited on a glass substrate using a dip-coating method and then annealed in air at various temperatures. The optical transmittances of the ITO films were measured by UV–Vis spectrometry, and the films were found to have a high transparency to visible light (in the case of a film thickness of 250 nm annealed at 400°C, the transparency was in excess of 95% over the range λ=450–800 nm, with a maximum value near 100% at wavelengths above λ=700 nm). The optical transmittances of the films were influenced by the size of the ITO particle used, the film thickness and the annealing temperature. The ITO films showed a minimum resistivity of 9.5×10−2Ω cm, and their resistivity was affected by both the ITO particle size and the annealing temperature used.