Ratiometric Optical Temperature Sensor Using Two Fluorescent Dyes Dissolved in an Ionic Liquid Encapsulated by Parylene Film
Ratiometric Optical Temperature Sensor Using Two Fluorescent Dyes Dissolved in an Ionic Liquid Encapsulated by Parylene Film
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DOI：
10.3390/s130404138
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发表时间：
2013-04-01
期刊：
影响因子：
3.9
通讯作者：
Shimoyama, Isao
中科院分区：
文献类型：
--
作者：
Kan, Tetsuo;Aoki, Hironori;Shimoyama, Isao
研制了一种使用温敏荧光染料的温度传感器。液滴传感器的直径为40 μ m，使用1g/L的罗丹明B（RhB）和0.5g/L的罗丹明110（Rh 110），它们是溶解在离子液体（1-乙基-3-甲基咪唑乙基硫酸盐）中的荧光染料，以用作温度指示剂。使用真空聚对二甲苯膜沉积（其被称为聚对二甲苯-液体-沉积（PoLD）方法）封装该离子液体。液滴由化学稳定且不可渗透的Parylene薄膜密封，这可以防止染料与溶液中的分子相互作用，并保持荧光材料的体积和浓度固定。这两种荧光染料使得能够以比率方式测量温度，使得液滴传感器可以用于各种应用中，例如微区域的无线温度测量。该传感器可以测量这种微区的温度，精度为1.9摄氏度，精度为3.7摄氏度，荧光强度变化灵敏度为1.0%/K。该传感器可以测量水中不同传感器深度的温度，范围从0到850 μ m。液滴传感器采用微机电系统（MEMS）技术制造，非常适用于芯片实验室设备。
A temperature sensor that uses temperature-sensitive fluorescent dyes is developed. The droplet sensor has a diameter of 40 mu m and uses 1 g/L of Rhodamine B (RhB) and 0.5 g/L of Rhodamine 110 (Rh110), which are fluorescent dyes that are dissolved in an ionic liquid (1-ethyl-3-methylimidazolium ethyl sulfate) to function as temperature indicators. This ionic liquid is encapsulated using vacuum Parylene film deposition (which is known as the Parylene-on-liquid-deposition (PoLD) method). The droplet is sealed by the chemically stable and impermeable Parylene film, which prevents the dye from interacting with the molecules in the solution and keeps the volume and concentration of the fluorescent material fixed. The two fluorescent dyes enable the temperature to be measured ratiometrically such that the droplet sensor can be used in various applications, such as the wireless temperature measurement of microregions. The sensor can measure the temperature of such microregions with an accuracy of 1.9 degrees C, a precision of 3.7 degrees C, and a fluorescence intensity change sensitivity of 1.0%/K. The sensor can measure temperatures at different sensor depths in water, ranging from 0 to 850 mu m. The droplet sensor is fabricated using microelectromechanical system (MEMS) technology and is highly applicable to lab-on-a-chip devices.