Liquid phase epitaxy magnetic garnet films and their applications
Liquid phase epitaxy magnetic garnet films and their applications
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液相外延磁性石榴石薄膜及其应用
DOI：
10.1088/1674-1056/27/8/086701
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发表时间：
2018
影响因子：
1.7
通讯作者：
Zhang HW
中科院分区：
文献类型：
--
作者：
Rao Yi-Heng;Zhang Huai-Wu;Yang Qing-Hui;Zhang Dai-Nan;Jin Li-Chuan;Ma Bo;Wu Yu-Juan;Zhang Dai-Nan;Zhang HW
液相外延（LPE）是一种成熟的技术。利用液相外延技术制备磁性单晶薄膜的早期实验主要集中在微波和磁光器件的厚膜上。液相外延是制备厚膜、低阻尼磁性石榴石薄膜和高质量磁光材料的一种很好的方法。目前，应用材料的主要挑战是利用现代光刻技术制造亚微米器件。到目前为止，液相外延法制备的磁性石榴石薄膜在纳米尺度（约100 nm）上仍表现出最好的质量，这是液相外延法所不可能实现的。
Liquid phase epitaxy (LPE) is a mature technology. Early experiments on single magnetic crystal films fabricated by LPE were focused mainly on thick films for microwave and magneto–optical devices. The LPE is an excellent way to make a thick film, low damping magnetic garnet film and high-quality magneto–optical material. Today, the principal challenge in the applied material is to create sub-micrometer devices by using modern photolithography technique. Until now the magnetic garnet films fabricated by LPE still show the best quality even on a nanoscale (about 100 nm), which was considered to be impossible for LPE method.