High-Contrast Chemically Amplified Photodefinable Poly(benzoxazole) Using Dissolution Reversers
High-Contrast Chemically Amplified Photodefinable Poly(benzoxazole) Using Dissolution Reversers
复制标题
使用溶解逆转剂的高对比度化学放大光定义聚（苯并恶唑）
DOI：
10.2494/photopolymer.17.247
复制
发表时间：
2004
影响因子：
0.8
通讯作者：
K. Katoh
中科院分区：
文献类型：
--
作者：
Tomonori Minegishi;H. Takusari;K. Katoh
提出了一种将化学放大系统应用于聚苯并恶唑的新型热稳定性正色光可定义材料。为了在制备厚膜的同时获得高的溶解对比度，我们重点研究了由聚苯并恶唑前驱体、光酸发生器和溶解反向器组成的三组分体系。在这篇文章中，我们描述了在曝光和未曝光区域提供显著不同溶解速率的溶解反向器的设计概念。此外，我们还讨论了所提出的材料的光刻和薄膜性质。在溶出行为研究的基础上，我们设计了一些具有应用前景的二元酸类化合物作为溶出反转剂。我们发现，使用溶解反向器的化学放大的聚苯并恶唑将提供优异的光刻性能，如高灵敏度、高分辨率和良好的临界尺寸控制，以及与传统的不可光定义聚酰亚胺相媲美的优异的薄膜性能。
A novel thermal-stable positive-tone photodefinable material has been proposed which applies chemical amplification system to a poly(benzoxazole). To fabricate thick film and also to obtain high dissolution contrast, we paid attention to a three-component system consisting of a poly(benzoxazole) precursor, photoacid generator, and dissolution reverser. In this paper, we describe the design concept of dissolution reversers affording a significant difference in dissolution rate between the exposed and the unexposed area. Moreover, we discuss the photolithographic and film properties of the proposed material. On the basis of the dissolution behavior study, we have designed some promising dicarboxylic acid derivatives for dissolution reversers. We found that the chemically amplified poly(benzoxazole) using the dissolution reversers will afford excellent photolithographic properties such as high sensitivity, fine resolution, and good critical dimension control, along with excellent film properties comparable to those of the conventional non-photodefinable polyimide.