Consistent optical surface inspection based on open environment droplet size-controlled condensation figures
Consistent optical surface inspection based on open environment droplet size-controlled condensation figures
复制标题
DOI：
10.1088/1361-6501/ac0d24
复制
发表时间：
2021
影响因子：
2.4
通讯作者：
Jingyang Yan;Rui Ma;Xian Du
中科院分区：
文献类型：
--
作者：
Jingyang Yan;Rui Ma;Xian Du
凝聚图（CF）是一种简单且具有成本效益的检测产品表面图案和缺陷的方法。这种检测方法是基于表面上的能量差。由于润湿性对比，水滴优先成核并在亲水区域上生长。所形成的CF可以进一步被分割以用于识别和测量表面上的图案。最先进的CF方法是封闭环境的，而受控开放环境CF在制造和质量检测中具有更广泛的应用。这种应用缺乏开放环境的CF主要是因为不可用的液滴尺寸控制方法。本文设计了一种基于开放环境液滴尺寸可控光纤的高分辨率光学表面检测系统。这是通过实时成像和识别表面上的冷凝液滴尺寸和密度来完成的，并且相应地通过蒸汽流速来调节表面上的液滴的汽化和蒸发。我们的实验结果表明，在实验室设置中，对于不同的金属基底，液滴的平均直径可以控制在3.5 µm以下。我们还测试了用于检测金表面上线宽为5 µm的自组装单层图案的系统;这可以很有希望地用于柔性器件制造中印刷图案的在线质量监控和过程控制。
Condensation figure (CF) is a simple and cost-effective method to inspect patterns and defects on product surfaces. This inspection method is based on energy differentials on surfaces. Due to wettability contrast, water droplets are preferentially nucleated and grown on hydrophilic regions. The formed CF can further be segmented for the recognition and measurement of the patterns on the surfaces. The state-of-the-art CF methods are close-environmental, while controlled open-environmental CF has broader applications in manufacturing and quality inspection. The lack of open-environmental CF for such applications is mostly because of the unavailable droplet size control methods. In this paper, we designed a high-resolution optical surface inspection system based on open environment droplet-size-controlled CFs. This is done by real-time imaging and recognizing the condensed droplet sizes and densities on surfaces, and accordingly tuning the vaporization and evaporation of droplets on the surface by the vapor flow rate. Our experimental results show that the average diameter of droplets can be controlled below 3.5 µm in a laboratory setup for different metal substrates. We also test the system for inspecting self-assembled monolayer patterns with line width of 5 µm on a gold surface; this can be promisingly used for online quality monitoring and in-process control of printed patterns in flexible devices manufacturing.