Optical sensitivity non-uniformity analysis and optimization of a tilt optical readout focal plane array
Optical sensitivity non-uniformity analysis and optimization of a tilt optical readout focal plane array
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DOI：
10.1088/0960-1317/26/2/025001
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发表时间：
2016-02
影响因子：
2.3
通讯作者：
Jianyu Fu;Haiping Shang;H. Shi;Zhigang Li;Y. Ou;Dapeng Chen;Qingchuan Zhang
中科院分区：
文献类型：
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作者：
Jianyu Fu;Haiping Shang;H. Shi;Zhigang Li;Y. Ou;Dapeng Chen;Qingchuan Zhang
由于微加工技术的原因，光学读出焦平面阵列（FPA）在初始状态下具有不同倾斜的反射/吸收面。反射/吸收镜的角度偏差对光学灵敏度非均匀性有很大影响，是影响成像均匀性的关键因素。本研究通过理论分析，发现在sio2 -铝（Al）双层支架中应力匹配有助于降低光学灵敏度的不均匀性。利用磷离子注入来控制SiO2薄膜中的应力。通过控制注入能量和剂量，可以改变应力和应力稳定性。采用基于P+注入的应力控制技术，成功地制备了光学读出FPA。结果表明，光学读出FPA的灰度响应不均匀性由25.69%下降到10.7%。
An optical readout focal plane array (FPA) usually has a differently tilted reflector/absorber at the initial state due to the micromachining technique. The angular deviation of the reflector/absorber has a strong impact on the optical sensitivity non-uniformity, which is a key factor which affects the imaging uniformity. In this study, a theoretical analysis has been developed, and it is found that the stress matching in SiO2-Aluminum (Al) bilayer leg could make a contribution towards reducing the optical sensitivity non-uniformity. Ion implantation of phosphorus (P) has been utilized to control the stress in SiO2 film. By controlling the implantation energy and dose, the stress and stress stability are modified. The optical readout FPA has been successfully fabricated with the stress-control technique based on P+ implantation. It is demonstrated that the gray response non-uniformity of optical readout FPA has decreased from 25.69% to 10.7%.