Thermodynamic Analysis of InxGa1-xN Alloy Composition Grown by Metalorganic Vapor Phase Epitaxy
Thermodynamic Analysis of InxGa1-xN Alloy Composition Grown by Metalorganic Vapor Phase Epitaxy
复制标题
金属有机气相外延生长的 InxGa1-xN 合金组合物的热力学分析
DOI：
10.1143/jjap.35.l673
复制
发表时间：
1996
影响因子：
1.5
通讯作者：
Hisashi Seki Hisashi Seki
中科院分区：
文献类型：
--
作者：
A. Koukitu;N. Takahashi;Tetsuya Taki Tetsuya Taki;Hisashi Seki Hisashi Seki
本文对InxGa_（1-x）N金属有机气相外延（MOVPE）的合金成分进行了热力学分析。并与文献报道的实验数据进行了比较。结果表明，MOVPE生长的In_xGa_（1-x）N合金的固体成分受晶体学控制。本文还讨论了固体成分偏离线性关系的原因。
A thermodynamic analysis of alloy composition is described for metalorganic vapor phase epitaxy (MOVPE) of Inx Ga1-x N. The vapor-solid distribution relationship is discussed in comparison with the experimental data reported in the literature. It is shown that the solid composition of Inx Ga1-x N alloy grown by MOVPE is thermodynamically controlled. The origin of the deviation of the solid composition from the linear relation is also discussed.