Fabrication of stable, low optical loss rib-waveguides via embossing of sputtered chalcogenide glass-film on glass-chip
Fabrication of stable, low optical loss rib-waveguides via embossing of sputtered chalcogenide glass-film on glass-chip
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DOI：
10.1007/s11082-014-9917-z
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发表时间：
2015-02
影响因子：
3
通讯作者：
N. Abdel-Moneim;C. Mellor;T. Benson;D. Furniss;A. Seddon
中科院分区：
文献类型：
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作者：
N. Abdel-Moneim;C. Mellor;T. Benson;D. Furniss;A. Seddon
我们报道了低损耗，单模脊形光波导片上，制造使用热压第一次的射频transporteredchalcogenide玻璃薄膜上的chalcogenide玻璃基板。制作了4- 6宽和高的波导。波导光损耗，使用法布里-珀罗技术，这是众所周知的高估损耗，被发现是0.78为TE模式，和0.81为TM模式，在1,550 nm波长。硫族化物脊形波导的玻璃稳定性是优秀的，并讨论了与他人的结果。
We report low-loss, single-mode rib optical waveguides on-chip, fabricated using hot-embossing for the first time of radio-frequency sputteredchalcogenide-glass thin films on a chalcogenide-glass substrate. Waveguides 4–6wide andhigh are fabricated. Waveguide optical loss, using the Fabry–Perot technique, which is known to over-estimate loss, is found to be0.78for the TE mode, and0.81for the TM mode, at 1,550 nm wavelength. Glass stability of the chalcogenide rib waveguides is excellent and is discussed in relation to the results of others.