Absolute distance measurement by using modified dual-wavelength heterodyne Michelson interferometer
Absolute distance measurement by using modified dual-wavelength heterodyne Michelson interferometer
复制标题
DOI：
10.1016/j.optcom.2009.01.015
复制
发表时间：
2009-05
影响因子：
2.4
通讯作者：
Kun-Huang Chen;Jing-Heng Chen;Sheng-Hua Lu;W. Chang;Chi-Chang Wu
中科院分区：
文献类型：
--
作者：
Kun-Huang Chen;Jing-Heng Chen;Sheng-Hua Lu;W. Chang;Chi-Chang Wu
本研究提出了一种改进的双波长外差迈克尔逊干涉仪来测量绝对距离，可以避免波长漂移的影响。这种改进的干涉仪由两个传统的迈克尔逊干涉仪组成。在迈克尔逊干涉仪的一个臂中引入了标准板。通过双波长外差干涉仪可以精确测量p偏振和s偏振测试光在两个干涉仪中的相位差。因此，可以通过将相位差代入专门的导出方程来确定绝对距离。同时，测试灯也受到相同的波长漂移效应。因此，可以抵消漂移带来的负面影响，并且可以显着提高测量稳定性。测量分辨率约为1.36μm，证明了该方法的可行性。此外，该方法结构简单，操作方便，测量快速。
This study proposes a modified dual-wavelength heterodyne Michelson interferometer for measuring the absolute distance that can avoid the influence of wavelength drifts. This modified interferometer consists of two conventional Michelson interferometers. A standard plate is introduced in one arm of one Michelson interferometer. The phase differences of p- and s- polarization test lights in the two interferometers can be measured accurately by dual-wavelength heterodyne interferometry. Hence, the absolute distance can be determined by substituting the phase differences into special derived equations. Meanwhile, the test lights suffer from the same wavelength drift effect. Therefore, the negative effect caused by the drift can be offset, and the measurement stability can be significantly increased. The feasibility of this method was demonstrated with a measurement resolution of about 1.36μm. Additionally, this method has a simple structure, easy operation and rapid measurement.