Surface-energy-driven intermixing and its effect on the measurement of interface stress
Surface-energy-driven intermixing and its effect on the measurement of interface stress
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DOI：
10.1063/1.372261
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发表时间：
2000-02
影响因子：
3.2
通讯作者：
B. Clemens;W. Nix;V. Ramaswamy
中科院分区：
文献类型：
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作者：
B. Clemens;W. Nix;V. Ramaswamy
我们表明，在多层膜中使用层应力和衬底力之间的力平衡提取界面应力的技术是非常敏感的少量的混合。如果不考虑无应变晶格参数的变化，那么即使只有半个单层的混合也能产生−2 N/m的表观界面应力。扩散和相互混合驱动的大的表面能差异已被观察到在几个系统中具有大的正混合热和有限的散装固体溶解度，并与最近报道的晶格参数测量在Ag/Ni多层膜。我们还提出了在原地应力测量的Ag/Ni系统，这是一致的表面能量驱动的混合。我们的结论是，银/镍基板和层应力之间的不平衡的报道可能不是由于负界面应力，但更符合表面能量驱动的混合的影响。
We show that the technique of extracting interface stresses in multilayers using a force balance between layer stresses and substrate forces is extremely sensitive to small amounts of intermixing. Intermixing of as little as one half of a monolayer can produce apparent interface stresses of −2 N/m unless changes in the unstrained lattice parameter are accounted for. Diffusion and intermixing driven by large surface energy differences has been observed in several systems with large positive heats of mixing and limited bulk solid solubility, and is consistent with recently reported lattice parameter measurements in Ag/Ni multilayers. We also present in situ stress measurements in the Ag/Ni system that are consistent with this surface-energy-driven intermixing. We conclude that the reported imbalance between substrate and layer stress forces in Ag/Ni is probably not due to negative interface stresses but is more consistent with the effects of surface-energy-driven intermixing.