H. Tanaka, S. Shimada, N. Ikawa: "Prediction of an Ideal Surface Processing of Monocrystalline Silicon for Minimal Surface Roughness and Damage by Molecular Dynamics Analysis"J. Soc. Grinding Engineers. 45, 4. 175-180 (2001)

H. Tanaka, S. Shimada, N. Ikawa: "Prediction of an Ideal Surface Processing of Monocrystalline Silicon for Minimal Surface Roughness and Damage by Molecular Dynamics Analysis"J. Soc. Grinding Engineers. 45, 4. 175-180 (2001)
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H. Tanaka、S. Shimada、N. Ikawa:“通过分子动力学分析预测单晶硅的理想表面加工,以实现最小表面粗糙度和损伤”J。

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