Three-dimensional interferometric stage encoder using a single access port
Three-dimensional interferometric stage encoder using a single access port
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DOI：
10.1016/j.optlaseng.2020.106342
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发表时间：
2021-02
影响因子：
4.6
通讯作者：
Kieran B. Wiseman;T. Kissinger;R. Tatam
中科院分区：
文献类型：
--
作者：
Kieran B. Wiseman;T. Kissinger;R. Tatam
我们提出了一种新的多维位置编码器的方法，使用范围分辨干涉（RRI），同时询问多个干涉仪不同的光路长度，只使用一个光电探测器和一个二极管激光器。仅采用安装在工作台上的非偏振分束器和来自三个正交的外部安装的平面镜的反射，形成三个笛卡尔测量方向，当与来自安装在工作台上的参考反射的测量相结合时，允许经由单个接入端口获得的工作台运动的三维测量。通过三维压电工作台在±50 μm的标称工作范围内的各种运动，在10 kHz正交带宽下获得了来自三个正交维度的位移的同时测量，实现了低于0.4 nm/Hz的典型位移噪声密度，在50 Hz以上，本底噪声降至0.1 nm/Hz以下，以及在所有三个方向上具有远低于1 nm的循环误差幅度的高线性度。
We present a novel multi-dimensional positional encoder approach that uses range-resolved interferometry (RRI) to simultaneously interrogate multiple interferometers differing in optical path length, using only a single photo detector and a single diode laser. Employing only stage-mounted non-polarising beamsplitters and reflections from three orthogonal, externally mounted, planar mirrors, three Cartesian measurement directions are formed, that when combined with measurements from a stage-mounted reference reflection, allow for three-dimensional measurements of stage motion obtained via a single access port. Through a variety of movements of a three-dimensional Piezo-electric stage over its nominal stage working range of±50 μm, simultaneous measurements of displacements from three orthogonal dimensions are acquired with a 10 kHz quadrature bandwidth, achieving typical displacement noise densities of below 0.4 nm/Hz, with the noise floor dropping to below 0.1 nm/Hz above 50 Hz, as well as high linearity with cyclic errors amplitudes well below 1 nm in all three directions.