Relation between Friction and Wear Properties and Delamination Behavior of Amorphous SiC Film Coated by Helicon Sputtering
Relation between Friction and Wear Properties and Delamination Behavior of Amorphous SiC Film Coated by Helicon Sputtering
复制标题
螺旋溅射非晶SiC薄膜摩擦磨损性能与分层行为的关系
DOI：
10.1299/kikaia.69.1731
复制
发表时间：
2003
期刊：
影响因子：
--
通讯作者：
Kazuhiro Tanaka
中科院分区：
文献类型：
--
作者：
Masahiko Kato;K. Nakasa;Xu Yan;Kazuhiro Tanaka
使用螺旋溅射装置在钛基底样品上沉积 SiC 薄膜。使用销盘式试验机对样品进行磨损试验，并从断裂力学的角度讨论了试验过程中薄膜的分层行为。非晶质SiC膜通过溅射形成，结晶质SiC膜通过加热基板而形成。非晶SiC薄膜比结晶SiC薄膜具有更低的摩擦系数和更高的界面断裂韧性，大大提高了钛的耐磨性。非晶 SiC 脱层时的磨损深度比结晶 SiC 薄膜深得多。在磨损测试中，在薄膜发生部分分层之前，垂直于摩擦方向开始产生平行裂纹，并且随着旋转周期的小幅增加，分层区域延伸到整个磨痕。当界面应变能量释放速率 G12 达到界面断裂韧性 GC12 时，薄膜开始分层，界面断裂韧性因磨损循环期间疲劳损伤的积累而降低。
SiC films were deposited on titanium substrate specimens by using a helicon-sputtering apparatus. Wear tests were carried out on the specimens using a pin-on-disk type testing machine, and the delamination behavior of the films during the tests was discussed from a viewpoint of fracture mechanics. Amorphous SiC film is formed by the sputtering, while crystalline SiC film is formed when the substrate is heated. The wear resistance of titanium is greatly enhanced by the amorphous SiC film with lower frictional coefficient and higher interfacial fracture toughness than the crystalline SiC film. The wear depth of the amorphous SiC at delamination is much deeper than that of the crystalline SiC film. In the wear test, parallel cracks are initiated perpendicular to the frictional direction before partial delamination of the film occurs, and the delamination area extends all over the wear scar with a small increase in rotation cycles. The delamination of film starts when the interfacial strain-energy release rate, G12, reaches the interfacial fracture toughness, GC12, which is decreased by the accumulation of fatigue damage during the wear cycles.