Mode Coupling and Nonlinear Resonances of MEMS Arch Resonators for Bandpass Filters.
Mode Coupling and Nonlinear Resonances of MEMS Arch Resonators for Bandpass Filters.
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MEMS ARCH共振器的模式耦合和非线性共振用于带通滤波器。
DOI：
10.1038/srep41820
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发表时间：
2017-01-30
影响因子：
4.6
通讯作者：
Younis MI
中科院分区：
文献类型：
--
作者：
Hajjaj AZ;Hafiz MA;Younis MI
我们实验证明了开发的非线性软化，硬化和转向现象（近交叉），其中两个振动模式的频率得到彼此接近，实现从通带到阻带的急剧滚降的带通滤波器。该概念是基于在空气中工作的电热调谐和静电驱动的MEMS拱形谐振器来证明的。面内谐振器由绝缘体上硅晶片制成，具有故意的曲率以形成拱形。通过谐振器施加DC电流以感应热量并调制其刚度，从而调制其谐振频率。我们发现，第一谐振频率增加到初始值的两倍，而第三谐振频率降低，直到非常接近第一谐振频率。这导致转向现象，其中两种模式耦合并交换能量。我们证明，通过驱动两种模式的非线性和静电转向制度附近，使第一和第三模式表现出软化和硬化行为，分别从通带到阻带的急剧滚降是可以实现的。通过控制压电陶瓷的驱动电压，我们得到了一个平坦的、宽的、可调的带宽和中心频率。
We experimentally demonstrate an exploitation of the nonlinear softening, hardening, and veering phenomena (near crossing), where the frequencies of two vibration modes get close to each other, to realize a bandpass filter of sharp roll off from the passband to the stopband. The concept is demonstrated based on an electrothermally tuned and electrostatically driven MEMS arch resonator operated in air. The in-plane resonator is fabricated from a silicon-on-insulator wafer with a deliberate curvature to form an arch shape. A DC current is applied through the resonator to induce heat and modulate its stiffness, and hence its resonance frequencies. We show that the first resonance frequency increases up to twice of the initial value while the third resonance frequency decreases until getting very close to the first resonance frequency. This leads to the phenomenon of veering, where both modes get coupled and exchange energy. We demonstrate that by driving both modes nonlinearly and electrostatically near the veering regime, such that the first and third modes exhibit softening and hardening behavior, respectively, sharp roll off from the passband to the stopband is achievable. We show a flat, wide, and tunable bandwidth and center frequency by controlling the electrothermal actuation voltage.