Surface characterization and depth profile analysis of glasses by r.f. GDOES
Surface characterization and depth profile analysis of glasses by r.f. GDOES
复制标题
通过射频对玻璃进行表面表征和深度剖面分析
DOI：
10.1002/sia.1584
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发表时间：
2003
影响因子：
1.7
通讯作者：
R. Payling
中科院分区：
文献类型：
--
作者：
P. Le Coustumer;M. Motelica‐Heino;P. Chapon;Hugues François Saint‐Cyr;R. Payling
玻璃的表面、界面和中间相的表征在分析上具有挑战性，并可能受益于射频辉光放电光学发射光谱(R.F.GDOES)适用于非导电材料。因此，本研究的主旨是评估R.F.的潜力。GDOES用于表征玻璃表面、物理异质性，如离散层和连续中间相，以及玻璃材料中元素的分布。因此，使用Jobin Yvon GDOES系统(5000 Rf)分析了结构和化学复杂性日益增加的模型玻璃：这些玻璃包括一个多层玻璃(三层镀膜玻璃)、两个光反应玻璃(具有潜在的化学扩散梯度)和具有蚀变层的酸浸玻璃。同时，用扫描电子显微镜或透射式电子显微镜结合能量色散X射线成像对玻璃的表面进行了表征，以评估材料中的化学和物理梯度，并研究了辉光放电溅射过程。由此，R.F.的能力。建立了玻璃材料中元素深度分布的GDOES。然而，尽管玻璃的溅射速率与导电材料(∼2 nm S−1与金属的50-150 nm S−1相比)相比大大降低，但R.F.GDOES为多种应用提供了良好的空间深度分辨率(Nm)和元素灵敏度，例如界面或中间相的表征以及玻璃中化学梯度的测定。此外，该技术可以区分镀膜玻璃中亚微米级的离散层，并可以监测元素在玻璃基质中的扩散。版权所有©2003 John Wiley&Sons，Ltd.
The characterization of surfaces, interfaces and interphases in glasses is analytically challenging and may benefit from recent developments in radiofrequency glow discharge optical emission spectroscopy (r.f. GDOES) applied to non‐conductive materials. Thus, the main thrust of this study is to evaluate the potential of r.f. GDOES for the characterization of glass surfaces, physical heterogeneities such as discrete layers and continuous interphases and the distribution of elements in glass materials. Model glasses with increasing structural and chemical complexity thus were analysed using a Jobin Yvon GDOES system (5000 RF): the glasses included a multilayered glass (triple‐coated glass), two photoreactive glasses (with potential chemical diffusion gradients) and acid‐leached glass with an alteration layer. Concurrently, surface characterization of the glasses was conducted using scanning electron microscopy or transmission electron microscopy with energy‐dispersive x‐ray imaging to assess the chemical and physical gradients in the materials and to investigate the glow discharge sputtering process. From this the capability of r.f. GDOES for elemental depth profiling in glass materials is established. However, although the sputtering rates for glass are greatly reduced compared with conductive materials (∼2 nm s−1 compared with 50–150 nm s−1 for metals), r.f. GDOES offers good spatial depth resolution (nm) and elemental sensitivity for several applications, such as the characterization of interfaces or interphases and the determination of chemical gradients in glasses. Furthermore, the technique distinguishes submicrometre discrete layers in the coated glass, and the diffusion of elements within glass matrices may be monitored. Copyright © 2003 John Wiley & Sons, Ltd.