Principle in Imaging Contrast in Scanning Electron Microscopy for Binary Microstructures Composed of Organosilane Self-Assembled Monolayers
Principle in Imaging Contrast in Scanning Electron Microscopy for Binary Microstructures Composed of Organosilane Self-Assembled Monolayers
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DOI：
10.1021/jp021362r
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发表时间：
2003
影响因子：
3.3
通讯作者：
N. Saito;Y. Wu;K. Hayashi;and Hiroyuki Sugimura;O. Takai
中科院分区：
文献类型：
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作者：
N. Saito;Y. Wu;K. Hayashi;and Hiroyuki Sugimura;O. Takai
利用场发射电子显微镜（FE-SEM）观察了两种不同类型的有机硅烷自组装膜（SAMs）的共面微结构。这些二元微结构是通过光刻技术在覆盖有自然氧化物的硅衬底上制备的。本研究中使用了四种类型的有机硅烷前体，它们是正十八烷基三甲氧基硅烷（ODS）、十七氟-1，1，2，2-四氢癸基-1-三甲氧基硅烷（一种氟烷基硅烷，FAS）、正（6-氨基己基）氨丙基三甲氧基硅烷（AHAPS）和4-（氯甲基）苯基三甲氧基硅烷（CMPhS）。由自组装膜组成的微图案在低加速电压（约0.6 kV）下通过FE-SEM清楚地成像。在FE-SEM中，自组装膜的亮度顺序为ODS > AHAPS > CMPhS > FAS。通过从头计算的分子轨道计算，这种FE-SEM对比度的起源归因于自组装膜之间的电子亲和势，这支配FE-SEM图像对比度。结果表明，FE-SEM…
Field-emission electron microscopy (FE-SEM) was applied to observe coplanar microstructures composed of two different types of organosilane self-assembled monolayers (SAMs). These binary microstructures were prepared on silicon substrates covered with native oxide by a lithographic technique. Four types of organosilane precursors, they are n-octadecyltrimethoxysilane (ODS), heptadecafluoro-1,1,2,2-tetrahydro-decyl-1-trimethoxysilane (a type of fluoroalkylsilane, FAS), n-(6-aminohexyl)aminopropyltrimethoxysilane (AHAPS), and 4-(chloromethyl)phenyltrimethoxysilane (CMPhS), were used in this study. Micropatterns composed of the SAMs were clearly imaged by FE-SEM at low acceleration voltages, around 0.6 kV. The brightness order of the SAMs in FE-SEM was ODS > AHAPS > CMPhS > FAS. Through ab initio molecular orbital calculations, the origin of this FE-SEM contrast was ascribed to the electron affinity between the SAMs, which governed the FE-SEM image contrast. It has been successfully demonstrated that FE-SEM ...