A two-axis water-immersible micro scanning mirror using hybrid polymer and elastomer hinges
A two-axis water-immersible micro scanning mirror using hybrid polymer and elastomer hinges
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DOI：
10.1016/j.sna.2020.112108
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发表时间：
2020-09-01
影响因子：
4.6
通讯作者：
Zou, Jun
中科院分区：
文献类型：
--
作者：
Duan, Xiaoyu;Li, Shuangliang;Zou, Jun
本文报道了一种新型的两轴浸水微扫描镜，它采用了聚合物和弹性体的混合铰链。快轴和慢轴铰链由刚性双向拉伸聚对苯二甲酸乙二醇酯(BOPET)和负载纳米氧化铝的柔性弹性体纳米复合材料(EN)制成。通过在基础弹性体树脂中加入不同浓度的纳米氧化铝来调节弹性体纳米复合材料的弹性模数。测试结果表明，当扫描镜浸入水中时，快轴的共振频率为226赫兹，而慢轴没有机械共振。利用混合铰链扫描镜实现了二维B超和三维体积超声显微镜的演示。以DC或极低频率扫描慢轴的能力允许形成密集的栅格扫描图案，以提高成像分辨率和视场。(C)2020爱思唯尔B.V.保留所有权利。
This paper reports a new two-axis water-immersible micro scanning mirror using hybrid polymer and elastomer hinges. The fast- and slow-axis hinges were made of stiff BoPET (biaxially-oriented polyethylene terephthalate) and soft elastomer nanocomposite (EN) loaded with alumina nanoparticles. Different concentrations of alumina nanoparticles in the base elastomer resin were tested to tune the elastic modulus of the elastomer nanocomposite. The testing results have shown a resonance frequency of 226Hz for the fast axis and no mechanical resonance for the slow axis when the scanning mirror was immersed in water. 2D B-scan and 3D volumetric ultrasound microscopy were demonstrated by using the hybrid hinge scanning mirror. The ability of scanning the slow axis at DC or very low frequencies allows a dense raster scanning pattern to be formed for improving both the imaging resolution and field of view. (C) 2020 Elsevier B.V. All rights reserved.