Reproducible fabrication and characterization of diamond membranes for photonic crystal cavities
Reproducible fabrication and characterization of diamond membranes for photonic crystal cavities
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DOI：
10.1002/pssa.201600656
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发表时间：
2016-12-01
影响因子：
2
通讯作者：
Becher, Christoph
中科院分区：
文献类型：
--
作者：
Jung, Thomas;Kreiner, Laura;Becher, Christoph
单晶金刚石已被证明是一种有前途的材料，用于量子信息处理，因为它能够拥有具有最佳特性的色心，例如窄发射线或长寿命自旋态。然而，金刚石的机械性能，如其硬度和耐化学性，使光子器件的制造具有挑战性。在这篇文章中，提出了一种方法来生产薄，独立的单晶金刚石膜。这些膜的特点是四种不同的技术，相互补充，并检测缺陷或厚度变化的金刚石薄膜具有高精度。精确的表征允许通过聚焦离子束铣削在所生产的膜中可再现地制造二维光子晶体腔。此外，还对聚焦离子束刻蚀工艺进行了优化，减小了光子晶体腔的缺陷。再加上后处理和色心的植入，这些金刚石纳米结构是腔耦合实验朝着可靠的自旋光子接口或光学机械设备的构建块。(C)2016 WILEY-VCH Verlag GmbH & Co. KGaA，魏因海姆
Single crystal diamond has turned out to be a promising material for applications in quantum information processing for its ability to host color centers with optimal properties such as narrow emission lines or long-lived spin states. However, the mechanical properties of diamond like its hardness and chemical resistance make the fabrication of photonic devices challenging up to date. In this article, a method is presented to produce thin, free-standing single crystal diamond membranes. These membranes are characterized with four different techniques complementing one another and detecting defects or thickness variations in the diamond films with high accuracy. The precise characterization allows for reproducible fabrication of two-dimensional photonic crystal cavities by focused ion beam milling in the as-produced membranes. Furthermore, optimizations in focused ion beam milling are presented, reducing imperfections of the fabricated photonic crystal cavities. Together with post-processing and implantation of color centers, these diamond nanostructures are a building block for cavity coupling experiments toward reliable spin-photon interfaces or optomechanical devices. (C) 2016 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim