Fabrication and test of radial grooved micro heat pipes
Fabrication and test of radial grooved micro heat pipes
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DOI：
10.1016/s1359-4311(02)00085-6
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发表时间：
2002-10
影响因子：
6.4
通讯作者：
Shung-Wen Kang;Sheng-Hong Tsai;Hong-Chih Chen
中科院分区：
文献类型：
--
作者：
Shung-Wen Kang;Sheng-Hong Tsai;Hong-Chih Chen
This paper describes the development of radial grooved micro heat pipes (MHPs) with a three-layer structure. The MHPs were designed to allow separation of the liquid and vapor flow to reduce the viscous shear force. The 5×5 cm2MHP array was fabricated by using bulk micromachining and eutectic bonding techniques on 4-in. (100) silicon wafers. Experiments were undertaken to evaluate the performance of wafers with three different wafer fill rates at different input powers. We glued a heater below the evaporator section, pumped cold water through a square copper heat exchanger above the heat pipe, and pasted 15 K-type thermocouples on both sides of MHP structure to record the variations of surface temperature. After the evaluation, the MHP with 70% fill rate showed the best performance as compared to samples with smaller fill rates.
